All-strong-condition ultraviolet lasers are already extensively used in the fields of mechanical flaw detection, lithography, micromachining and medication for the advantages of little volume, extended existence, large efficiency, good beam quality, huge tuning and slim spectral line, and so forth. Utilizing superior electricity in close proximity to-infrared coherent gentle supply as the fundamental frequency resource based upon nonlinear tuning technological know-how, building ultraviolet coherent radiation by multistage frequency conversion is regarded as a crucial approach to develop the ultraviolet coherent light supply.
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We summarized the current development position in the high-electric power DUV laser each for the wavelength of FHG in the one-μm laser and at 193 nm. The modern advancement of the reliable-point out/fiber laser, plus the nonlinear optical crystals, prompts not only the common ability but also the beam good quality (coherence) of the DUV lasers to an unprecedented degree.
For illustration, The existing concave OC could be replaced by a airplane mirror which could mitigate the ability density about the surface area of M1 and the diamond. What's more, working with large damage threshold coatings for M1 and diamond would also improve the output electric power without any damages. Then, the NIR laser within the 2nd Stokes wavelength could possibly be high ample, along with its superior beam top quality, to deliver the final DUV laser at 193 nm by using a superior regular power.
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Both of those the 1040 nm and 1078 nm laser originate from one particular twin-wavelength Yb-doped fiber laser. Each individual laser is amplified by levels of fiber amplifier and Yb-doped elements amplifier, respectively.
On another side, the ability scaling from the NIR laser is yet another element to enhance the common power on the 193-nm DUV laser. Due to the deficiency of the superior-electrical power amplification Option of the NIR laser (by way of example at 1553 nm), nonlinear frequency processes for instance optical parameter oscillation (OPO) could be applied to develop a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength and also getting relative higher electricity [21]. Recently, a diamond Raman laser showed its capacity in accomplishing a high electrical power and a high conversion effectiveness with the 1st Stokes with the one-μm laser [22,23], which suggests the possibility for being applied inside the 193-nm DUV laser generation as a result of its large Raman obtain and large frequency change.
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The pulse length of the next Stokes light was shortened to five ns as shown in Determine 7a, a single-shot photo from your oscilloscope, which is a typical phenomenon in Raman laser [forty four] although the heart beat duration with the pump laser was 10 ns.
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Tunable ultraviolet laser supply according to reliable-condition dye laser know-how and CsLiB6O10 harmonic era
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The development on the 193-nm laser was demonstrated by phases of SFG. To be able to scale the DUV laser electric power successfully, a completely new idea on the 193-nm DUV laser technology is presented depending on the diamond Raman laser.